摘要
提出了一种以单个直角棱镜为敏感元件的三维小角度同时测量方法。准直光束垂直入射到镀有分束膜的直角棱镜的斜边面，其反射光束产生2倍于俯仰和偏摆角的偏向，由四象限探测器QD。接收，可实现俯仰和偏摆角测量；透射光束经直角棱镜反向折回，其方向也发生2倍于俯仰角的偏向，同时产生包含滚转角信息的平移，此光束由另一四象限探测器QD：接收，利用两个四象限探测器差分测量可实现滚转角测量，并避免了误差串扰，同时增强了抗干扰能力。通过理论分析及实验验证了方法的可行性，在设定参数下，偏摆、俯仰角和滚转角测角分辨率可分别达到约0．1”和0．3”，测角精度约为1”和2”。
A novel high-precision measurement method for simultaneously measuring three-dimensional small angles is presented. The collimated beam is normally incident upon the hypotenuse-surface of rectangular-prism with splitting film. The displacements of the reflection beam and transmitted beam are measured by quadrant photoelectric detectors QD1 and QD2, respectively. The direction change of the reflection beam is double that of yaw and pitch and the direction change of the transmitted beam is double that of pitch. So the displacement introduced by roll can be measured by differential measurement based on two quadrant photoelectric detectors. This method can avoid crosstalk of straightness errors, yaw and pitch errors and enhance the anti-interference ability of the system. Feasibility of the method is verified by theoretical analysis and experiments. When the system parameters are set, the angular resolution for the yaw, pitch and roll can reach to 0.1＂ and 0.3＂, respectively, and the measuring accuracies are about 1＂ and 2＂, respectively.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2013年第B12期196-200,共5页
Chinese Journal of Lasers
基金
国家自然科学基金（51275032）、国家自然科学基金联合基金～河南人才培养联合基金（U1304507）、河南省科技厅重点攻关项目（122102210436）
关键词
测量
三维角度
激光准直
直角棱镜
measurement
three-dimensional angles
laser collimation
rectangular prism
