摘要
传统的波面干涉检测是通过记录干涉条纹,然后对干涉系统进行分析、判读,最后获得波面的变形信息。这是一种典型的静态测量法,精度较低、测量周期长。本文提出了一种全新的测试方法,即基于光电技术的波面动态测量法,论文对该测量法的测试原理、设备基本构成及实际应用等作了较详细的介绍。此方法具有的高测量精度、高灵敏度及测量自动化、实时化、数字化等优点,代表了光学测试技术的新水平和发展方向。
The traditional wave surface interference examination is through the recording interference fringe,then carries on the analysis,the interpret to the interference system,finally obtains the wave surface the distortion information.This is one kind of typical static survey law,the precision is low,the survey cycle is long.This article proposed one brand--new test method,namely based on the photoelectricity technology wave surface dynamic survey law,the paper to this survey method test principle,the equipment basic constitution and the practical application and so on has made the detailed introduction.This method has high merits and so on measuring accuracy, high sensitivity and survey automation,solid current events,digitization,have represented the optics test technology new level and the development direction.
出处
《科技创新导报》
2013年第28期1-3,共3页
Science and Technology Innovation Herald
关键词
波面
干涉条纹
光电技术
光学测试
Wave surface= Interfere with grain= Optoelectronics technique= optical testing
