摘要
设计了一种集激光光束质量分析、光电自准直、激光自准直和光轴一致性检测等多种检测功能为一体的多功能光电检测系统．系统工作波长范围为300～1700nm，准直准确度2”，角分辨力0．1”．设计了一种长焦距平行光扩束系统和三光轴系统，采用带有中心平面的、可移动的复曲面摄远物镜，物镜口径75mm，扩展口径至400mm，使系统实现了光轴一致性、出射激光指向及多参量集成检测功能，集成化程度高．利用光学设计软件ZEMAX进行系统仿真和优化设计，在全视场内，不同波长所对应的各焦距位置50lp／mm处MTF〉0．2．成功研制一台功能样机，并于加工装调后进行了测试试验，结果表明该仪器获取图像清晰准确，能够满足测试要求．
An optical system of optical multi-functions detector was designed, which combined multiple detection functions such as laser beam quality analysis, photoelectric auto-collimator, laser auto-collimator, optical coherence detection as one. Its operating wavelength range was 300-1700 nm, alignment accuracies was 2＂ and angular resolution was 0. 1＂. One kind of parallel light beam expanding system and three-axis system that had a long focus was designed, and a kind of removable toric lens telephoto with a central plane was adopted. The objective lens diameter was 75 ram, extend to 400 mm diameter. It enabled the optical system to achieve consistency, outgoing laser pointing and integrated multi-parameter detection and had high degree of integration. Furthermore, it used the optical design software ZEMAX for system simulation and optimization. As a result, the modulation transfer functions at 50 lp/mm for the position of the focal length corresponding to different wavelengths are greater than 0.2n in the whole field of view. Then, a functional prototype was successfully developed, and processing equipment was tested after adjustment. Finally, the results show that it can get clear and accurate images in the focus range. The system satisfies the command of test requirements.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2013年第12期1507-1513,共7页
Acta Photonica Sinica
基金
吉林省重大专项-科技发展计划项目新型光电子器件及应用技术项目(No.20100610)
吉林省科技发展计划(Nos.20080331
20090555)
高功率半导体激光国家重点实验室科研基金(No.91400310405)资助
关键词
光学设计
光电多功能检测
复曲面设计
扩束系统
多光轴系统
摄远物镜
多重组态
Optical design
Optical multi-functions detection
Toric lens design
Beam expander system
Multi-optical axis system
Telephoto lens
Multiple configurations
