摘要
针对超精密运动平台部件中部分材料精确参数未知、粘结层准确模拟困难导致动力学建模精度相对较低的问题,提出一种基于参数灵敏度分析和优化的模型修正方法,获取面向精确动力学分析所需的高精度动力学模型。建立虚拟材料属性的粘结层单元代替原有的节点重合建模方法,利用参数灵敏度分析得到未知材料参数对结构模态影响的大小,以模态实验结果为目标选取灵敏度大的未知的材料参数进行优化,得到超精密运动平台部件的修正模型。实验结果证实,修正后动力学模型的模态频率及传递函数与实验结果之间的误差较修正前均明显降低,可用于后续超精密运动平台整体动力学特性的精确预测。
A model modification method via sensitivity analysis and optimization is proposed to improve the accuracy of dynamic model for the precision motion stage.New adhesive layer elements with suppositional material properties are put forward instead of node coincidence so as to accurately simulate the dynamics of thin adhesive layer between two rnatedals.Sensitivity analysis is carried out to figure out quantitatively the influence of suppositional material parameters on structural model.And then the optimization is carried out for selecting material parameters to obtain dynamic model which is matched with the experimental results.The experimental results show that the modal frequencies and transfer functions for the modified dynamic model are closer to the experimental results than the original one.The modified dynamic model can be used for accurately predicting dynamics of overall precision motion stage.
出处
《机械制造与自动化》
2013年第6期7-10,14,共5页
Machine Building & Automation
基金
国家自然科学基金重点项目(51235005)
国家重点基础研究发展计划(973计划
2009CB724205)
关键词
精密运动平台
灵敏度分析
优化
模型修正
precision motion stage
sensitivity analysis
optimization
model modification
