摘要
In order to model the hysteresis behavior of a nano piezoelectric actuator(PA)on nano scale in a real time system,a new hysteresis modeling method based on an improved sub-pixel blocking matching algorithm with an optimal block size is proposed in this paper.First,Preisach model is introduced to model the hysteresis behavior of a piezoelectric actuator.Then,a real time block matching algorithm is researched and its block size is optimized with a standard object.Finally,experiments are performed with respect to a nanometer movement platform system,and the results show the feasibility and validity of the sub-pixel estimation based block matching algorithm and its application in modeling the hysteresis behavior of PA.
基金
supported by the National Natural Science Foundation of China(Grant No.61305025)
