摘要
在分度运动控制系统中以DMC2210控制卡为核心,采用光栅尺为分度运动反馈器件,实现了高精度的实时监测反馈。针对工作台"过冲"现象进行了两方面的分析优化:一方面,分析了步进电机减速方式对刻划效果的影响,通过分段减速初步改善了工作台"过冲"现象;另一方面,分析并模拟了弹簧(联接工作台和分度丝杠螺母)刚度对工作台"过冲"问题的影响,更换大刚度弹簧后,很大程度改善了工作台"过冲"现象。改进后对光栅刻线密度为79 g/mm的中阶梯光栅进行了多次刻划试验,计算的机器分度精度均在5 nm以内,选取其中一组较好的数据(机器分度精度为2.887 nm)与之前多次刻划试验中较好的一组数据(机器分度精度为7.759 nm)进行了比较,结果表明刻划机分度精度得到很大的提高。
A high precision closed-loop control positioning system taking the DMC2210 card as a control core is designed, which uses linear encoder as feed-back component to realize the precise positioning of indexing movement. The analysis and optimization pointing to the phenomenon of workbench＇s overshoot is carried out in two parts. One part, the relation between stepping motor＇s deceleration and ruling precision is analyzed, and then the phenomenon of workbench＇s overshoot is optimized preliminarily by the stepwise deceleration＇s style. The other part, the influence of spring＇s stiffness on workbench＇s overshoot problem is analyzed and simulated. After the change for spring with stronger stiffness, the index error caused by workbench＇s overshoot phenomenon is improved largely. After the improvements, extensive tests on ruling gratings with density of 79 g/mm are carried out. Experimental results indicate that the precision of the indexing movement at ruling echelle with 79 g/mm is controlled in 5nm.We select one of the better data （the indexing movement＇s precision is 2.887 nm） after our improvement to compare with one of the better data （the indexing movement＇s precision is 7.759 nm） in the previous tests. The result shows that the ruling engine＇s indexing precision is significantly improved.
出处
《光电工程》
CAS
CSCD
北大核心
2013年第10期90-94,共5页
Opto-Electronic Engineering
基金
国家自然科学基金(61176085
11105149)
国家科技支撑计划(2011BAF02804)
国家重大科学仪器设备开发专项(2011YQ15004004)
关键词
光栅尺
过冲
弹簧刚度
分度精度
linear encoder
overshoot
spring＇s stiffness
indexing precision
