摘要
压电陶瓷驱动器在微位移定位方面被广泛应用,但压电陶瓷驱动器的迟滞非线性严重影响其定位精度,因此,介绍了各种改善压电陶瓷驱动器迟滞非线性特性的方法,并提出了用3次样条插值法和最小二乘曲线拟合法来实现压电陶瓷驱动器的精确定位,改善压电陶瓷驱动器的迟滞非线性特性,实验表明,以上方法可使压电陶瓷驱动器的定位误差小于5%。
The piezoelectric actuators are widely used in the field of micro displacement positioning, but its hys- teretic nonlinear property has serious effect on the positioning accuracy of piezoelectric actuators. In this paper,vari- ous kinds of methods of improving the hysteretic nonlinear property of piezoelectrie actuator have been introdueed. The cubic spline interpolation method and least-square curve fitting method have been proposed to achieve the precise positioning of piezoelectric actuators and improve the hysteretic nonlinear property of piezoelectric ceramic actuators. The experimental results have shown that the proposed methods can make the positioning error 06 piezoelectric actu- ator down to 5%.
出处
《压电与声光》
CSCD
北大核心
2013年第5期694-697,701,共5页
Piezoelectrics & Acoustooptics
基金
吉林省科技发展计划基金资助项目(241630)
关键词
压电陶瓷
压电陶瓷驱动器
迟滞非线性
piezoelectric ceramic
piezoelectric ceramics driver
hysteresis nonlinearity
