摘要
由于相移式横向剪切干涉仪相移单元的分辨率、精度等参数直接影响其测试物镜波像差的精度,本文根据相移式横向剪切干涉测试原理,设计了采用宏微复合运动模式的相移组件,该相移组件可在25 mm行程内实现纳米级的相移运动。重点分析了柔性铰链复合四杆结构微动单元初始设计参数间的数学规律,计算了铰链刚度与弱截面应力,并给出了具体的设计实例。采用有限元分析方法,对设计实例中微动单元的相移量与压电陶瓷(PZT)出力之间的作用规律进行仿真,并分析了相移精度。结果显示,PZT在促动力输出范围内可促动0.1 mm^1 nm的一维相移运动,理论精度优于3.5 nm。微动单元的开环标定测试结果表明,相移微动单元的实际精度优于5 nm。
As the resolution, accuracy and other parameters of the phase-shifting unit in a phase-shift ing lateral shearing interferometer will directly affect the test accuracy of wavefront aberration for a lithograph objective, a phase-shifting component with macro and micro compound motion modes was designed based on the principle of phase-shifting test for wavefront aberration. It could achieve a phase-shifting resolution of 3 nm in a 25 mm travel range. Moreover, the mathematical relation of ini- tial parameters was analyzed for the micro unit with a flexure hinge composited four linkage structure. The stiffness and weak interracial stress of the flexure hinge were calculated, and a design example was given. The finite element analysis method was used to simulate the relation between phase-shift- ing value and the output of piezoelectric ceramic （PZT） and to analyze the phase-shifting accuracy. The results show that the PZT can actuate one-dimensional phase-shifting motion in 0.1 mm-1 nm within its output range, and the theoretical accuracy is better than 3.5 nm. The open-loop calibration test shows that the actual accuracy of micro-motion unit in the phase-shifting component is better than 5 nm.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第9期2244-2251,共8页
Optics and Precision Engineering
基金
科技部重大专项基金资助项目(No.2009ZX02202-005)
关键词
光学测量
波像差
相移式干涉仪
剪切干涉仪
柔性铰链
optical testing wavefront aberration phase-shifting interferometer shearing interferometer flexure hinge
