摘要
为了进一步提高器件性能,设计一种新型隔热背腔式柔性热膜传感器探头结构。借助流体传热耦合仿真和动态响应分析等,确定背腔结构参数;研发针对隔热背腔式柔性热膜探头的双面图形化微加工工艺,获得新型传感器件。对静/动态特性进行对比测试,结果表明:在相同的输入被测量情况下,新结构器件的输出信号量值提高了20%,时间常数由400μs减小到220μs,器件的灵敏度和动态响应性能都获得了有效提升。
To improve the sensitivity and dynamic performance, presented a new type of flexible hot film sensor with a cavity underneath for thermal insulation. With FVM simulation and dynamic performance analysis, the structural parameters of the cavity were determined. The double side micromachining processes of flexible hot film sensor with the cavity underneath were proposed. The static and dynamic performance of two kinds of sen- sor were studied in wind tunnel. Compared with the sensor without cavity, the new sensor shows 20% output increase with the same input and time constant drop from 400 μs to 220 μs. This means higher sensitivity and dynamic response speed were obtained.
出处
《航空工程进展》
2013年第3期327-332,共6页
Advances in Aeronautical Science and Engineering
基金
国家自然科学基金(50775188)
关键词
柔性热膜
隔热背腔
仿真
微加工
flexible hot film
insulating cavity
simulation
micromachining
