摘要
针对一种陶瓷真空界面、天鹅绒阴极和不锈钢外壳的无氧铜压封高功率微波管,利用真空设计软件VacTran建立了系统抽气模型,模拟了真空室主要材料放气率和抽气曲线;通过吸气剂简单吸气模型,对保真空过程中吸气剂的吸气行为进行了模拟。实验对比了高功率微波管真空室在常温和烘烤状态下抽真空至10-4Pa量级所需的时间。在真空度满足要求后,采用非蒸散型吸气剂(NEG)作为吸气泵进行保真空实验,静态下保真空超过30d后,真空度仍维持在2×10-4Pa。在此基础上,对保真空状态下的高功率微波管进行加速寿命实验:温度为80℃,累计时间超过140h,真空度仍好于1×10-2Pa,据此估计高功率微波管在常温下保持真空度高于1×10-2Pa的时间超过1年。
For a high power microwave source composed of ceramic vacuum interface,velvet cathode and stainless steel shell,which is sealed with knife-edge oxygen free copper gasket seals,the outgassing rates of the major materials and pumping down curves are simulated by the vacuum design software VacTran.The adsorption behavior of non-evaporable getter（NEG） is simulated by using a simple model in the high vacuum maintenance process.Pumping down times to 10-4 Pa in normal temperature and baked state are compared in experiments.NEG is adopted as inspiration pump when the vacuum reaches to the work pressure.The experimental results show that the pressure is still kept at 2×10-4 Pa after 30-day high vacuum maintenance.The accelerated life test of the high power microwave tube is done under the temperature of 80℃for more than 140hours,the pressure in the high power microwave tube is still lower than 1×10-2 Pa.Accordingly,the vacuum holding life lower than 1×10-2 Pa at room temperature is estimated more than one year.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2013年第9期2329-2333,共5页
High Power Laser and Particle Beams
基金
国家高技术发展计划项目
关键词
高功率微波管
非蒸散型吸气剂
加速寿命试验
真空寿命
high power microwave tube
non-evaporable getter
accelerated life test
vacuum holding life
