期刊文献+

多束动态混合注入技术制备TiN厚膜的工艺、结构及性能研究 被引量:1

A study on process, structure and characteristics of TiN thick film prepared by MBMI technology
下载PDF
导出
摘要 在多束动态混合(MBMI)-注入系统上利用MBMI技术制备TiN膜,XRD分析表明,N+入射角度α(°)、氮钛原子到达比RN/Ti、 N2分压PN2对膜生长的择优取向及相结构有影响;性能研究结果表明。高的入射离子能量Ei、基体温度Ts以及合适的RN/Ti对TiN膜的显微硬度HK和膜-基结合力都有正面影响。 TiN thick films were prepared by multi-ion-beam dynamic mixing implanting (MBMI) technology and their structure and characteristics were analyzed by XRD, microhardness analysis and scratch test. The structure analysis results indicate that the phase structure of TiN films are affected by the implantation angle of nitrogen ion, the nitrogen to titanium atom ratio and the pressure of nitrogen gas. The performance tests show that higher temperature of substrate Ts and suitable RN/Ti are important for increasing the microhardness (HK) of TiN films and the stickiness between TiN film and substrate.
出处 《核技术》 CAS CSCD 北大核心 2000年第10期678-682,共5页 Nuclear Techniques
关键词 氮化钛膜 制备 结构 性能 MBMI IBAD Multi-ion-beam dynamic mixing, Ion beam enhanced deposition, Ion implantation, Preferred orientation
  • 引文网络
  • 相关文献

参考文献3

二级参考文献2

  • 1龙振湖,2nd international workshop of plasma-based ion implantation,1995年 被引量:1
  • 2龙振湖,大连理工大学学报,1995年,35卷,2期 被引量:1

同被引文献4

引证文献1

二级引证文献2

相关主题

;
使用帮助 返回顶部