摘要
以紫铜为基体,采用热丝CVD法合成金刚石薄膜,研究了钛过渡层及研磨金刚石粉(俗称"种植晶仔")预处理对金刚石薄膜生长状态的影响。用X射线(XRD)、拉曼光谱、扫描电镜(SEM)对所沉积的金刚石薄膜进行了研究。研究发现:活性钛金属过渡层有利于金刚石的形核,而且也提高了成膜质量;"种植晶仔"预处理有利于金刚石形核,而且减少了非晶碳的形成。
Diamond films were synthetized by the hot filament chemical vapor deposition technique on red copper substrates. The effects of buffer layvr of titanium and pretreatment on red copper substrates were analyzed. The diamond films were characterized by SEM, XRD and Raman spectroscopy. The results show that titanium-buffered copper substrate enhances the crystalline quality of diamond and nucleation; abrading interlayer of titanium with diamond powders not only benefits to nucleation and growth of diamond films, but also decreases the amount of carbon impurity.
出处
《热加工工艺》
CSCD
北大核心
2013年第14期97-99,共3页
Hot Working Technology
基金
广东省科技计划项目(2011A081301003)
关键词
金刚石薄膜
热丝CVD
钛过渡层
研磨预处理
diamond films
hot filament chemical vapor deposition
buffer layer of titanium
abrading pretreatment
