摘要
讨论了对发射电子束具有聚焦作用的场发射阵列 ,并制作了样管。为了抑制发射电子束的发散 ,采用电子束聚焦的方法。文中给出了三种结构的聚焦方案 ,开发的透明电阻层Ni SiO2
Electron beam focusing of the field emitter arrays (FEA) was studied.A focusing electrode was developed in FEA to suppress defocusing of the field emission electron beams.The growth of a transparent resisting Ni SiO 2 thin films,on which a hole can be made with precise size in the focussing electrode,was discussed.
出处
《真空科学与技术》
CSCD
北大核心
2000年第5期352-354,共3页
Vacuum Science and Technology
关键词
聚焦电极
双门聚焦
自对准
聚焦场发射阵列
Focusing electrode,Double-gate focusing,Self-adjustment,Focusing field emitter array
