摘要
针对石英基声表面波双端谐振器,进行理论分析、结构设计和加工制作,最后完成谐振器样机性能测试分析。利用耦合模(COM)理论模拟谐振器的性能,建立叉指换能器(IDT)的COM方程,利用FEMSDA软件得到石英基片中声表面波的色散曲线,提取出COM参数。利用COM软件仿真谐振器的结构参数对其性能的影响,确定谐振器的结构参数。利用传统光刻和腐蚀工艺制作出声表面波谐振器样机,最后用矢量网络分析仪对制作的声表面波谐振器性能进行测试,得到谐振器中心频率为78.34 MHz,插入损耗为-11.273 dB,Q值为6 465.7,该谐振器能够满足实际的应用需求。
A surface acoustic wave resonator （SAWR） based on the ST quartz was theoretically analyzed, designed and fabricated, and finally the performance of the resonator was tested and analyzed by establishing the coupling-of-model （COM）. The COM equation of the interdigital transducer （IDT） was established through the performance of the resonator simulated theoreti cally with the COM, and the dispersion curve of the SAWR based on the ST quartz was obtained with the FEMSDA software, and COM parameters were collected. The influence of the structure parameters of the resonator on the performance was simulated with the COM software, and the structure parameters of the resonator were determined. The resonator was fabricated using the traditional optical lithography technology and wet etching process. Finally, the performance was tested using the vector network analyzer. And the results show that the actual center frequency of the resonator is 78.34 MHz, the insertion loss is - 11. 273 dB, and the Q value is 6 465.7. The fabricated resonator can satisfy the actual application requirements.
出处
《微纳电子技术》
CAS
北大核心
2013年第6期380-385,共6页
Micronanoelectronic Technology
