摘要
本文对高T_c超导薄膜的原位制备进行了初步的探索,利用脉冲激光淀积法成功地在600℃的衬底上原位制备出零电阻温度T_c(R=0)>84K,ΔT=2K的YBCO超导薄膜。靶材为烧结好的YBa_2Cu_3O_x块材,所用衬底为SrTiO_3(100),薄膜厚度约为1500(?),表面光滑,呈黑色。XRD、SEM结果表明薄膜有明显的垂直于膜面的C轴织构,在零磁场下,临界电流密度Jc(77.5K)>5×10~5A/cm^2。
This article presents our initial research work on in-situ fabrication of high Tc superconducting thin films.The YBCO films with zero resistance temperature Tc (R=0) >84K. have been successfully fabricated by pulsed laser deposition technique with substrate temperature at about 600℃. The target used is sintered YBa2Cu3Ox bulk disk. The substrate material is SrTiO3 (100) single crystal.The in-situ thin film shows black color and smooth surface with thickness about 1500A.The XRD and SEM results show that the films are orientated with C-axis perpendicular to film surface.In zero magnetic field the critical current density Jc (77.5K) > 5×105A/cm2.
出处
《低温与超导》
CAS
CSCD
北大核心
1991年第1期45-48,共4页
Cryogenics and Superconductivity
