8SHIMADA S.Feasibility study on ultimate accuracy in micro-cutting using molecular dynamics simulations[J].Annals of the CIRP,1993,42(1):91-94. 被引量：1
9WECK M,KLOCKE F.Manufacturing and applications of non-rotationally symmetric optics[J].SPIE,1999,3 739:94-107. 被引量：1
10GAO W.Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder[J].Precision Engineering,2003,27:289-298. 被引量：1
