摘要
由于目前的微塑性成形技术存在尺寸效应、成形不均匀、加工效率低、成本高、污染环境等问题,讨论并研究了一种新的微成形方法—激光层裂微成形技术。建立了理论模型分析研究在激光驱动飞片加载下薄膜与基体层裂及薄膜微成形的影响因素,设计并完成了实验,考察了激光能量、薄膜厚度及薄膜种类对激光层裂微成形的影响。研究发现,该技术可以实现薄膜微成形,激光能量大小及薄膜的种类是影响薄膜与基体层裂的关键因素,一定范围内薄膜厚度对薄膜成形影响较小,但是超出其范围对薄膜成形将有重要影响作用。因此,激光层裂微成形是具有应用前景的可控制与可操作的薄膜微成形技术。
Laser spallation technique, as a new micro-forming processing technique, is discussed, because several disadvantages exist in current micro-forming processing including size effect, unevenness in forming, low efficiency, high cost and high pollution. A theoretical analysis model is established to investigate the influential factors of thin films and substrate spallation under laser driven flyer. Laser energy, film thickness and type of film are investigated in experiment as they may affect the outcome of laser spallation micro-forming. The experiments show that the technique can achieve microstructure forming of thin films, and laser energy and film type are deciding factors in interfacial spallation. Film thickness within a certain range is less important, but it has significant influence on thin films micro-forming when it is out of the certain range. Therefore, laser spallation has the potential to become a controllable thin films micro-forming technique for commercial applications.
出处
《激光与光电子学进展》
CSCD
北大核心
2013年第4期127-132,共6页
Laser & Optoelectronics Progress
基金
国家自然科学基金(50975128)资助课题
关键词
激光技术
薄膜
微成形
激光驱动飞片
层裂
laser technique
thin films
micro-forming
laser driven flyer
spallation
