摘要
针对装备智能化与监测系统无线化发展对振动传感器的要求,基于微机电系统和应力集中技术,提出并研制一种具有孔缝双桥结构的高灵敏度、高固有频率的压阻式微型加速度传感器。结合理论分析与数值计算方法,分析该结构的特性,通过研究孔缝尺寸对传感器性能的影响确定传感器敏感结构尺寸。传感器芯片采用微细加工工艺制作,并在简单的封装之后进行静态、动态性能测试。试验结果表明,孔缝双桥结构加速度传感器在3 V供电电压下,灵敏度可达到0.424 mV/g,相对传统双桥结构提高了60%以上,而测得的固有频率相对于传统双桥结构仅略有下降,仍在10 kHz以上。孔缝双桥结构加速度计通过引入应力集中孔缝,以较小的固有频率损失,明显提高了传感器的测量灵敏度,具有更为优良的综合性能。
Combining the development requirements of intelligent equipment and wireless detection system, a piezoresistive microaccelerometer with high sensitivity and resonant frequency is presented based on micro-electro-mechanical system （MEMS）technology and stress concentration. Theoretical modeling and numerical calculation are performed to specify its structure parameters. Sensor chips are fabricated by micromachining technique and tested to characterize its static and dynamic properties. Experimental results show that the sensitivity of slotted quad-beam structure accelerometer is as high as 0.424 mV/g with a 3 V power supply. Compared with the traditional quad-beam structure sensor, an increase of sensitivity by 60% is obtained, with a slight decrease of natural frequency which is still higher than 10 kHz. The introduction of stress concentration slots into quad beams promises the sensor characters by improving sensitivity remarkably and sacrificing slight natural frequency.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2013年第6期198-204,共7页
Journal of Mechanical Engineering
基金
国家自然科学基金(51275402)
国家重点基础研究发展计划(973计划
2009CB724405)
国家科技重大专项(2011ZX04004-061)
长江学者和创新团队发展计划(IRT1033)资助项目
关键词
孔缝双桥结构
加速度传感器
压阻式
微机电系统
Slotted quad-beam structure Accelerometer Piezoresistive Micro-electro-mechanical systems
