摘要
传统的系统标定和相位测量是分开进行的,所测量的是物体相对于参考面的高度。提出一种快速的系统标定方法,用块规代替传统方法中由机械移动装置控制的标准平面,在块规表面采样标定点完成系统标定,实现系统标定与待测物相位测量的同步进行;当待测物支撑面与参考面不重合时,依然能准确测量物体相对支撑面的高度。对一高度为14.00 mm的立方块测量的结果显示,当其支撑面相对参考面发生纵向移动或倾斜时平均相对误差不高于1.35%,均方差小于0.15 mm。该方法简化了标定过程,在实际应用中更具普适性。
A fast calibration was proposed, in which two gauge blocks were used to replace the standard plane controlled by the mechanical shifting device in the traditional calibration, and fewer datum points were sampled from the surface of the gauge blocks to calibrate the system. With this method, both system calibration and phase measurement can be implemented simultaneously. The real height of the object relative to the supporting plane can be obtained when the supporting plane was not superposed on the reference. A cuboid block of normal height of 14.00 mm was successfully measured by this method. Its mean relative error was no more than 1.35% and the root-mean-square error was less than 0.15 mm. The calibration was simplified and became more flexible with the proposed method.
出处
《四川大学学报（工程科学版）》
EI
CAS
CSCD
北大核心
2013年第1期164-168,共5页
Journal of Sichuan University (Engineering Science Edition)
基金
国家科技重大专项(2009ZX02204-008)
国家"863"计划资助项目(2007AA01Z333)
四川省学术和技术带头人培养基金资助项目(07GRC-01)
湖北省教育厅自然科学研究资助项目(B201001203)
关键词
相位测量轮廓术
相位高度映射
系统标定
3维面形测量
快速
phase measuring profilometry
phase-to-height mapping
system calibration
three-dimensional shape measurement
fast
