摘要
主要分析变面积式微机械加速度敏感元件中的固定平行电极间寄生电容对系统噪声的影响,建立敏感元件的电磁仿真模型,进行噪声公式的推导,并得到了实验验证。通过仿真分析发现,铝电极下的玻璃衬底是增大该寄生电容的主要因素。实验结果表明,该寄生电容会增加60%以上的系统噪声。
This paper mainly analyzes the influence on noise of the parasitic capacitance between the fixed parallel electrodes in a variable-area type MEMS accelerometer sensor. An electromagnetic simulation model is built. The noise formula is derived and it is verified by experiment. The simulation results indicate that the glass substrate under the parallel electrodes can increase the capacitance. The experiment results show that the parasitic capacitance will raise the noise by 60% or more.
出处
《传感技术学报》
CAS
CSCD
北大核心
2013年第1期17-20,共4页
Chinese Journal of Sensors and Actuators
基金
中央高校基本科研业务费专项资金资助(2012QNA4021)
关键词
微机电加速度计
寄生电容
噪声分析
电容检测
MEMS accelerometer
parasitic capacitance
noise analysis
capacitance measurement
