摘要
获取单晶硅边缘特征信息是测量其直径的前提。使用CCD摄像头采集部分等径阶段的单晶硅视频图像,并通过一系列图像处理的方法定位其边缘。首先用三次样条法对所摄取的图像进行插值放大以提高图像的分辨率,再使用中值滤波处理以减少边缘模糊现象以及噪声的产生,然后分析图像直方图,选取适当的阈值,把光圈与背景图像分割开来,并使用Canny算子提取单晶硅边缘,得到的边缘光滑、连通,为进一步检测单晶硅直径创造了良好的条件。
Acquisition of crystal image edge is the premise of diameter detection. In this paper, the partial seeding step image of crystal is collected by CCD camera and location of crystal edge is acquired by a series of image processing. Flatly, the image shouht be enlarged by cubic spline interpolation in order to increase resolution of the image. Secondly, median filtering is used to reduce the image noise and blurring of the edge. Then, aperture and background image can be separated by analyzing histogram and selecting the threshold value. Finally, the edge of crystal is available to be obtained by u- sing Canny, and the smooth and continue edge creates good condition for crystal diameter detection further.
出处
《电视技术》
北大核心
2013年第5期189-191,共3页
Video Engineering
关键词
单晶硅
提高分辨率
图像处理
crystal
increase resolution
image processing
