摘要
为了满足同步辐射光源光束线和实验站真空联锁保护系统的需要 ,本实验室研制出超高真空计、快阀及快阀控制器。本文介绍超高真空计及快阀控制器的设计 ,给出了光束线和实验站真空联锁保护系统的应用实例。
The designs of vacuum sensor, fast closing valve and its controller are described. They are used as main components of vacuum interlocking protection system for beamlines and experimental stations of synchrotron radiation source. An example of application is given.
出处
《分析仪器》
CAS
2000年第3期5-8,共4页
Analytical Instrumentation
