摘要
微型光机电系统 (MOEMS)是将微光学、微电子和微机械系统结合发展出一种新型、宽广的应用领域 ,从早期的分立光学元件与电子电路向独立完整的光学系统发展。阐述了实现MOEMS的 2种技术手段 :光波导和微型光学平台的原理、制作工艺和关键技术 ,在此基础上概要介绍了几种典型的MOEMS系统。最后对其的发展作了展望。
Micro?Opto?Electro?Mechanical System(MOEMS)is a novel and broader class of device,which merges micro?optics,microelectronics,and micro?mechanics together.Micro?optical elements were hybridized with electronic circuit in the first generation and miniaturized optical systems also advanced to nearly complete monolithic systems as microelectronic technology advanced.In this paper,the principle,fabrication process and some key technologies of optical guide and micro optical bench,which are two main technical means to achieve MOEM system,are expounded and some typical MOME systems are introduced too.Finally give a vista for MOEMS.
出处
《电子工业专用设备》
2000年第3期1-7,12,共8页
Equipment for Electronic Products Manufacturing
基金
国家重点基础研究项目(G199903-07)
关键词
微型光机电系统
制作
集成电路工艺
Micro-Opto-Electro-Mechanical System
fabrication
IC process
