摘要
采用直流磁控溅射的方法,在不同温度的玻璃衬底上生长Zn3N2薄膜.研究了衬底温度对样品的微结构、表面形貌以及光学性质的影响.结果表明,随着衬底温度的升高,生长的Zn3N2薄膜择优取向增多;晶粒尺寸逐渐变大;Zn3N2薄膜间接光学带隙由1.86 eV逐渐增大到2.26 eV.
Zinc nitride thin films have been deposited on glass at different temperatures by using a DC magnetron sputtering system. Effects of substrate temperature on the mierostructure,surface morphology and optical properties of the films were investigated. The results indicate that the preferred orientations increase, the film grains get bigger, and the indirect transition optical band gap increases from 1.86 to 2. 26 eV with the increase of substrate temperature.
出处
《华南师范大学学报（自然科学版）》
CAS
北大核心
2012年第4期66-69,共4页
Journal of South China Normal University(Natural Science Edition)
基金
国家自然科学基金项目(61072028)
广东省自然科学基金项目(10151063101000048)
关键词
氮化锌薄膜
直流磁控溅射
表面形貌
光学带隙
zinc nitride films
DC magnetron sputtering
surface morphology
optical band gap
