摘要
对多晶硅生产中的冷氢化工艺做了简单介绍,重点介绍了冷氢化工艺中四氯化硅的4种汽化方式,包括电加热汽化、导热油汽化、直接混合汽化和强制混合汽化,并对这4种汽化方式的优缺点进行了比较,为多晶硅生产工厂和多晶硅工艺设计提供参考。
The hydrogenation in the process of polysilicon production was briefly introduced, and four vaporization methods of silicon tetrachloride were mainly illustrated, including electrical heating vaporization, thermal oil vaporization, unforced mixture vaporization and forced mixture vaporization. The advantages and disadvantages of these methods were contrasted, which can provide reference for polysilicon plants and polysilicon process design.
出处
《化学工程》
CAS
CSCD
北大核心
2012年第12期75-78,共4页
Chemical Engineering(China)
关键词
多晶硅
冷氢化
四氯化硅
汽化
polysilicon
hydrogenation
silicon tetrachloride
vaporization
