摘要
干涉测量的面形重复精度一定程度上依赖于测量框架结构的稳定性,从测量框架高稳定性的使用要求出发,对测量框架的机械结构进行了设计。在此基础上针对检测框架在随机振动下的稳定性问题,建立了检测框架的有限元模型,以实际测量的随机振动速度功率谱密度(PSD)为激励,运用ANSYS有限元分析软件中的随机振动分析模块,对该结构的随机振动响应进行了分析计算。通过分析计算得出测量框架在随机振动下的稳定性为0.5144nm,实验测量出5s内的稳定性为0.653nm,二者基本吻合。分析表明,测量框架的结构设计以及振动环境满足稳定性的指标要求。
Repeatability of interferometry depends on the stability of metrology frame to a certain extent, according to the requirements of stability, structure of the frame is designed. Aiming at the stability problem of high precision metrology frame caused by random vibration, the finite element model of a metrology frame is established, the power spectral density （PSD） measured on the fixed platform is used as the excitation, and then the random vibration response of the frame is analyzed with the PSD module of ANSYS. The analyzed result of stability is 0. 5144 nm, and the experimental value is 0. 653 nm, they are in good agreement, and the structure of frame and the actual vibration condition meet the stability requirements of metrology frame.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2012年第11期127-130,共4页
Chinese Journal of Lasers
基金
国家科技重大专项基金资助课题
关键词
测量
稳定性分析
干涉测量框架
有限元分析
随机振动分析
measurement
stability analysis
interferometry frame
finite-element analysis
random vibration analysis
