摘要
高速动态角度计量是目前计量领域的热点,金属圆光栅在其中有着重要应用,高速过程中的数据处理是动态角度计量的难点.本文使用CPLD与单片机相结合作为控制系统和数据处理系统,大大提高了测角速度,在莫尔条纹的电子细分过程中采用了鉴相式载波调制法.通过对动态测角系统进行误差分析,验证了本系统的可行性,为角度计量工作提供了量值溯源与传递的依据.
High-speed dynamic angle metrology is a research hotspot in the metrology field, the metal circlegrating has the important application in it, and the data processing is a difficulty in the dynamic angle metrol- ogy system. We combined the CPLD and MCU to be the control system and data processing system, the speed of angle measurement was greatly improved in this way, and we used the phase-carrier modulation method during the process of Moire stripe electronic subdivision. By analyzing the angle measurement system error, we verified the feasibility of this system and all of these provide the basis for value traceability and delivery during the metrology work.
出处
《测试技术学报》
2012年第6期508-512,共5页
Journal of Test and Measurement Technology
关键词
金属圆光栅
动态测角
角度计量
莫尔条纹
误差分析
metal circle-grating
dynamic angle measurement
angle metrology
Moire stripe
error analysis
