摘要
文中从理论和实验分析了热处理条件对溅射法制得的InSb薄膜特性的影响。热处理温度、时间和升降温速率都对薄膜特性有影响 ,通过实验得出了最佳的热处理温度、恒温时间和升降温速率。最后讨论了热处理过程中所采用的
Annealing effect of sputtered InSb thin films is described in the paper .InSb thin films properties are affected by thermostatic temperature,time and the rate of heating-up and cooling.By experiments the best temperature,time and the rate of heating-up and cooling are given.At last 3 protecting films on the InSb used in annealing are discussed.
出处
《仪表技术与传感器》
CSCD
北大核心
2000年第9期15-16,共2页
Instrument Technique and Sensor
