摘要
调制器是光纤系统的重要器件。硅基微机械光调制技术使用常规硅平面工艺方法 ,制作较为简单 ,成本较低。同时 ,又具有高数据速率 (几Mb/s)和宽频带( 1 3μm～ 1 5 μm)性能 ,满足日益增长的波分复用 (WDM )全光网络发展的需要。讨论了有关硅基微机械式光调技术的基本原理和一些相关的制作方法 。
Optical modulators are important devices in optical fiber communication system. Silicon based Micro Electro Mechanical optical modulator is fabricated using conventional silicon processing techniques, so the modulator fabrication is simple and the cost of the modulator is exceedingly low. At the same time, within a broad optical bandwidth (1.3μm～1.5μm), it can provide high datarate (several Mb/s) of Wavelength Division Multiplexed modulation. In this paper, the theories of silicon optical modulator and some methods used to fabricate it are described. Multi film optical modulator sample has been fabricated.
出处
《微细加工技术》
EI
2000年第2期45-49,共5页
Microfabrication Technology
基金
上海市优秀学科代头人!"微机械光调制技术"资助项目 (97×D140 0 9)
上海市科委 1999年度重点科技攻关资助课题
关键词
微机械系统
光调制器
波分复用
Micro Electro Mechanical System (MEMS)
optical modulator, planar silicon processing techniques
Mechanical Anti Reflection Switch (MARS)
