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MEMS加速度计的动态倾角测量性能研究 被引量:3

Study on the Dynamic Inclination Measurement Performance of MEMS Accelerometer
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摘要 为了分析MEMS加速度计的动态倾角测量性能,组建了虚拟仪器架构的倾角测量系统,通过设计的模拟实验对MEMS加速度计和传统膜电位倾角传感器的动态倾角测量性能进行了比较研究;结果显示:两种传感器所测的动态倾角信号具有很强的相关性,利用拟合曲线所得加速度计所测信号与基准信号间的最大偏差、均方误差、平均能量差异等指标均小于传统倾角传感器所测数据;提高运行速度后发现倾角信号振荡加剧,加速度计所测信号波动幅度较小且高频成分丰富,膜电位倾角传感器所测信号出现相位滞后;表明MEMS加速度计适合于一般工业场合下的低速动态测量,其所测信号与基准信号间的偏差小,信号波动幅度小、失真小;采用软、硬件信号处理手段,可以有效改善环境干扰对测量的影响。 To meet the demand for dynamic inclination measurement in field and to study the characteristics of MEMS accelerometer, an inclination testing system is set up based on virtual instrument. A simulated experiment is designed to compare the performance of the accelerometer and the thin-- film. The results are that the dynamic signals are well correlated. Meanwhile the maximum deviation, the mean square error and average energy difference between accelerometer dynamic fitting curve and the reference one are better than traditional tilt sensor. While increasing the speed, the vibration of both dynamic signals aggravates except that the signal of accelerometer bears less oscillation and richer high--frequency contents. Also the signal of tilt sensor lags in phase. It shows that MEMS accelerometer is suitable for low-- speed dynamic inclination measurement and its signal bas less error, smaller fluctuation range, and lower distortion than typical tilt sensors.
作者 王鹏
出处 《计算机测量与控制》 CSCD 北大核心 2012年第10期2661-2663,共3页 Computer Measurement &Control
关键词 MEMS加速度计 动态倾角测量 刚性罐道 膜电位传感器 MEMS accelerometer dynamic inclination measurement steel guide thin-film tilt sensor
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