摘要
针对微机械领域中常用的静电梳微谐振子 ,对其悬臂梁的两种结构——蟹脚型结构和直脚型结构的受力情况作了分析 ,推导出应力和位移的计算方法 ,据此从理论上阐述了在实际中多用直脚型结构的原因。得出了比国外文献更符合实际情况的分析结果。
This paper investigates two of electro static driven comb microresonant structure suspensions——crab leg flexure and straight leg flexure,which are commonly used in microscopic machine field. The force loads,together with stresses and displacements, of these two flexures are analysed and calculated.Compared with the results by Pisano [2,3] , our results are more accurate and closer to real situation. This explains why straight leg flexures are more commonly used in practice.
出处
《机械科学与技术》
CSCD
北大核心
2000年第5期760-762,共3页
Mechanical Science and Technology for Aerospace Engineering
基金
上海市教委重点学科科研项目!( No.970 10 4)
关键词
静电梳微谐振子
蟹脚结构
直脚结构
力学分析
Electro static driven comb microresonator
Crab leg structure
Straight leg structure
Displacement
Stress
