摘要
多晶硅尾气回收中吸附塔再生气的主要成分为氢气,回收利用价值较高。阐述了多晶硅尾气回收吸附塔再生气冷凝气相回收利用的过程。分析发现吸附塔反吹气,经三级冷却将反吹气中的HCl、氯硅烷,进行分离回收,所得气相氢气回收再利用,造成回收氢气中的甲烷、氮气含量随时间变化累计增加。再生分离所得气相部分需要经过再处理才可进行回收利用。
Regeneration gas in adsorption tower of the the polysilicon exhaust recycle was mainly composed of hydrogen with higher recycling value. This paper describes regeneration gas condensate recycling process of the adsorption tower of the polysilicon tail recovery HCI and chlorosilane in the three cooling anti-blow gas were sepa- rated and recovered, obtained hydrogen can be recovered and again used. The contents of mathane and nitrogen in the recovery hydrogen were increased with time increase. The gas phase section should be retreated before recycling use.
出处
《精细与专用化学品》
CAS
2012年第8期14-16,共3页
Fine and Specialty Chemicals
关键词
尾气回收
吸附塔
氢气
再生气
exhaust gas recycling
adsorption tower
hydrogen
regeneration gas
