摘要
阐述了激光传感器在位移传感器现场校准装置中的应用,对激光传感器的测量原理及校准方法进行了分析。结合现场校准的特殊性,分析现场校准过程中的误差来源,提高现场校准的精度。应用2m比长仪对激光传感器进行溯源,研究激光传感器在大长度测量应用中提高精度的方法,采用曲线拟合的方法对测量结果进行补偿。最后应用空气弹簧隔振平台的高度监控系统对溯源后的激光传感器进行验证。实验结果表明,应用激光传感器的位移传感器现场校准装置,其精度可以达到0.1%。
An on-line calibration approach for industrial displacement transducers is developed. The laser displace- ment sensor is used as standard to improve its accuracy to meet the requirements in different applications. In order to a- chieve the objective, laser sensor is calibrated by automatic interference comparator. Analyzing the data are obtained from the device's application of air spring system in automatic interference comparator, the error compensation methods and mathematical model are presented. Experimental results show that laser sensor on-line calibration system can solve factory calibrating problems with accuracy requirement over 0. 1%
出处
《光学技术》
CAS
CSCD
北大核心
2012年第4期398-402,共5页
Optical Technique
关键词
现场校准
激光传感器
曲线拟合
on-line calibration
laser displacement sensor
curve fitting