摘要
真空比对标准装置是由真空泵、校准室、真空管道、各种阀门及真空规组成的。根据实际使用情况,从四个方面对真空比对标准装置进行了详细的分析,包括:校准室的研究、微调阀性能的研究、标准规计量学特性的研究、比对校准技术的研究和应用。
Vacuum comparison standard device is composed of vacuum pump,calibration chamber,vacuum pipe,many kinds of valves and vacuum gauge.Based on actual usage,the vacuum comparison standard device was analyzed in detail from four aspects,including the calibration chamber,performance of inching valve,metrological characteristic of standard gauge,comparison calibration technology and its application.
出处
《真空》
CAS
2012年第4期9-11,共3页
Vacuum
关键词
校准室
微调阀
标准规
比对校准技术
calibration chamber
inching valve
standard gauge
comparison calibration technology