摘要
介绍了一种梳状型一维位敏检测器 ( PSD)的结构 ,对其工作原理进行了分析 .比较测试了这种梳状结构 ( 1mm× 12 mm) PSD与普通块状型结构 ( 1mm× 3 mm) PSD的线性度 ,实验表明 :梳状结构的 PSD具有极高的线性度 (均方根非线性为 0 .17% F.S)和较小的边缘失真 .对影响一维 PSD线性度的因素进行了分析 ,并对结果进行了讨论 .
The structure and operation principle of a novel comb-type one dimensional position sensitive detector (PSD) with high linearity were described.The experimental results showed that the non-linearity of a 1mm×12mm comb-type PSD and a conventional block-type PSD were 0.17%F.S.in the range form 80μm to 11980μm and 1.5%F.S.in the range from 160μm to 2860μm,respectively.It also showed that the comb-type one suffered less distortion near the electrodes.The factors influencing the linearity of 1D-PSD were analyzed.The results were discussed.
出处
《光子学报》
EI
CAS
CSCD
2000年第8期764-768,共5页
Acta Photonica Sinica
