摘要
现在国外商用ZYGO干涉仪可提供一些基于ISO10110-5的面形评价参数,而国内的自制干涉仪还没有这项功能。ISO10110-5中提出这些面形评价参数的计算可以通过波面分解的方法实现。运用Gram-Schmidt最小二乘法拟合得到Zernike多项式系数,再从包含被测信息的原始波面中依次减去各种表面面形偏差,就可实现对这些参数的定量分析。通过与ZYGO干涉仪的输出对比,验证了自编拟合程序所得数据的有效性,而通过波面分解得到的各种干涉图也有益于光学加工者分析偏差原因和器件应用后果。
Now the abroad commercial interferometer ZYGO can provide some surface form evaluation coefficients based on IS O 10110-5, which the domestic interferometers don＇t have. These surface form evaluation coefficients can be actualized by the method of wavefront decomposition. Firstly the Zernike polynomial coefficients are achieved by Gram-Schmidt least square method, secondly different surface forms are subtracted from the original wavefront which contains the tested information, and thus the quantitative analysis of these coefficients is realized. Contrast with the output from ZYGO, the validity of the data from the self-compiled code is tested. And the interference patterns from the wavefront decomposition are also helpful to the optical processors to analyze the errors and the application result
出处
《大气与环境光学学报》
CAS
2012年第4期303-309,共7页
Journal of Atmospheric and Environmental Optics
