摘要
阐述了一种基于微机电系统的纳米力学测量方法和系统。开发了一种多功能的纳牛力致动器，可同时满足微拉伸测试系统、原子力显微镜等系统的需要，该致动器基于微机电系统，以静电侧向梳齿为基本结构，采用变间隙设计结构，实现小芯片尺寸、低压驱动、高分辨率（nN量级）和大输出力（大于1mN），并介绍了该测试系统的原理、结构、微机电系统的安装以及一些相关实验结果。
The development and test of nanomechanical measurement methods and systems on the basis of Micro Electromechanical Systems（MEMS） is described. A MEMS-based nanoforce actuator is presented, which is developed on the basis of an electrostatic lateral comb-drive, mainly for use in material miero/nano tensile testing and atom force microscope. In order to increase the output force, a post-fabrication gap reduction method is introduced, so that the nanoforee actuator shows such features as small size, low drive voltage, high resolution （ in the order of nN） and large actuation force （ 〉1 mN）, etc. Then the principle of these measurement systems, the design, the manufacture and the assembly of the MEMS as well as first test results and achieved performance parameters are described.
出处
《计量学报》
CSCD
北大核心
2012年第4期303-307,共5页
Acta Metrologica Sinica
关键词
计量学
微机电系统
纳牛力致动器
微牛/纳牛拉伸测试
原子力显微镜
静电侧向梳齿
Metrology
Micro-electro-mechanical system
Nanoforce actuator
Micro/Nano tensile testing
Atomforce microscope
Electrostatic lateral comb-drive
