摘要
金刚石薄膜的各种性质与天然金刚石几乎相同，具有非常广阔的工业前景。本文采用乙醇和氢气作为工作气源，利用微波等离子体化学气相沉积法，在较低的温度下制备了金刚石薄膜，并研究了金刚石薄膜生长的影响因素。
Research shows that the diamond film is the same as the natural diamond and possesses many industrial applications. Diamond films have been prepared from ethanol and hydrogen using micro- wave plasma CVD at a lower substrate temperature.
出处
《贵州工业职业技术学院学报》
2012年第2期21-23,共3页
GUIZHOU SCIENCE AND TECHNOLOGY PROFESSIONAL COLLEGE
关键词
化学气相沉积
金刚石薄膜
乙醇
Chemical vapor deposition
diamond films
ethanol
