摘要
法 珀干涉仪有较高的分辨率 ,但是由于受到激光器模间隔的限制 ,测量范围较小。介绍了使用换模锁定法对其进行扩展 ,实现了具有较大测量范围及纳米分辨率和测量精度的法 珀干涉仪 ,扩展了法
Fabry Parot interferometer has very high resolution. But the measurement range is a little smaller for the limit of the tuning range of the laser. The method of locking the slave laser to the successive resonance frequencies of the F P cavity to improve the measurement range is introduce. The Fabry Parot interferometer with larger measurement range and nanometer resolution is realized, and extends the measurement range largely.
出处
《光学技术》
CAS
CSCD
2000年第3期199-201,共3页
Optical Technique
关键词
法-珀干涉仪
纳米测量
测量范围
分辨率
Fabry Parot interferometer
nanometer measurement
enlarge measurement range
