摘要
首次利用前馈三层神经网络模型 ,建立了场发射薄膜的膜厚的神经网络预测模型 ,用金刚石薄膜的膜厚数据进行验证 .结果表明 ,该模型预测的相对误差小于 6.1 % .
A neural network model for prediction the thickness of thin film is established by using of firstly the BP model taken into account the characteristic of field\|emission in thin film. The data of thicknesses of diamond thin film is used to test the model. The results show that relative error of the prediction is within 6 1% and possess good forecast characteristics.
基金
国家自然科学基金!( 696760 0 4 )
教育部博士点基金!( 960 6980 3 )
