摘要
本文介绍了 RF溅射制备湿度敏感膜技术 ,讨论了衬底温度、工作气体及压力、放电电压及时间对湿敏膜感湿特性的影响。实验结果表明 。
The technology of humidity sensing film of RF sputtering manufacture is introduced in this article, discussing the effect of substrate temperature, working gas, working pressure, discharge voltage and discharge time on feature of humidity sensing film. The result of experiment demonstrated time humidity sensing film of good humidity sense can be made under seriously control the above factors.
出处
《真空》
CAS
北大核心
2000年第2期13-15,共3页
Vacuum
关键词
溅射
特性
湿敏薄膜
湿敏元件
sputtering
humidity sensing film
feature
