摘要
合成了含氟硅氧烷苯并噁嗪单体,在采用光学显微镜等考察水解沉积条件对单体在羟基化基片表面化学成膜的影响的基础上,考察了温度、时间等对聚苯并噁嗪成膜后表面能的影响,并对聚苯并噁嗪材料在不同热处理温度(100～350℃)下表面能的热稳定性能进行了研究。结果表明用pH=2的盐酸溶液调节沉积液所得单体膜最均一完整,聚合物的表面能随着固化时间的增加先降低后升高,固化温度越高,达到完全固化所需要的固化时间越短,在160、190、220、240℃下固化所得聚合物最低表面能分别是15.6mJ.m-2(4h)、15.0mJ.m-2(1h)、15.3mJ.m-2(15min)、15.5mJ.m-2(5min),均低于Teflon的表面能(22.0mJ.m-2)。聚合物膜表面能在低于200℃的温度下处理其表面能可基本保持不变,可以作为抗黏材料应用于纳米压印技术中。
One of the most important problems that are usually encountered with nano-imprint lithography is the tendency for the resist polymer to adhere to the mold surface during the demolding process.In general,one approach to reducing the adhesion is to apply a low-surface-free-energy release agent onto the surface of the mold.Polybenzoxazine is a recently discovered class of low-surface-free-energy materials.The pattern transfers have been realized by using the B-m polybenzoxazine-treated mold without any resist adhering to the surface of the mold in the nano-imprint lithography.However,the B-m polybenzoxazine release agent film may be damaged during demolding process.It is a conflicting and important question about how to lower the surface free energy of the release agent and enhance the adhesive force between the release agent and the mold.Therefore,a novel benzoxazine material which not only possessed oxazine structure but also had groups which could bond to the mold is synthesized.This novel benzoxazine material possessed low surface free energy and high adhesive force with the mold at the same time.The objective here was to study the surface properties of the novel polybenzoxazine.In this study,benzoxazine monomer with fluorinated silane-functional group was synthesized.The effect of hydrolytic immersion condition for the formation of films by covalent bonds was tested through optical microscope and contact angel measurement.Furthermore,the effect of curing temperature and curing time on the surface free energy of the polybenzoxazines were investigated through contact angel measurement.The thermal stability of the polybenzoxazine at various thermal processing temperatures（100～350℃）was also investigated.The results indicated that the immersion solution modulated by hydrochloric acid solution（pH=2）displayed the best film formation property.The lowest surface free energy of the polybenzoxazine cured at 160,190,220 and 240℃ were 15.6 mJ·m-2（4 h）,15.0 mJ·m-2（1 h）,15.3 mJ·m-2（15 min）,15.5 mJ
出处
《化工学报》
EI
CAS
CSCD
北大核心
2012年第6期1934-1942,共9页
CIESC Journal
基金
上海市科委纳米技术专项(0652nm001)
基于有机小分子的聚合物结晶过程调控机理与应用项目(10XD1401500)
关键词
聚苯并噁嗪
制备
表面性能
热稳定性能
polybenzoxazine
preparation
surface properties
thermal properties
