摘要
介绍了厚膜集成微压传感器的研制过程。此种集成微压传感器的量程为１ ｋＰａ、满量程输出为２５ ｍＶ、非线性小于０ ．２ ％ 、综合精度小于０ ．５ ％ 。
Introduce the research of the integrated micro-pressure thick-film sensor.The measurement range of the sensor is 1 kPa.The full-scale range is 25 mV.The nonlinearity is less than 0.2 %.The precision is less than 0.5 %.
出处
《电子工艺技术》
2000年第1期33-35,共3页
Electronics Process Technology
