摘要
详细论述了铟锡氧化物陶瓷靶(ITO陶瓷靶)的生产工艺性能要求 ,重点介绍了利用ITO陶瓷靶生产的电子溅射产品———ITO透明导电膜玻璃的应用前景。
The article detailedly discuss the production process and property requirements of ITO ceramic rake,centres on introduction of application prospectise of ITO trasparent conducting file glass,an electrica spray product produced by ITO ceramic rake.
出处
《江苏陶瓷》
CAS
2000年第1期9-11,共3页
Jiangsu Ceramics
关键词
铟锡氧化物
ITO
陶瓷靶
导电膜玻璃
电子陶瓷
Indium tin oxide ITO ceramic rake ITO trasparent conducting film glass General statement production Property application
