摘要
介绍了一种光刻机超高压汞灯电源,采用模拟功率反馈控制,有效提高了光源稳定性;重点阐述了恒功率控制的原理和主要电路结构。
A super-high pressure mercury lamp power of mask aligner is introduced in this paper,using analogue power feedback control,effectively improving power stability.The principle and major circuit structure of constant power control are emphatically expounded in this paper.
出处
《电子工业专用设备》
2012年第4期40-42,共3页
Equipment for Electronic Products Manufacturing
关键词
超高压汞灯
恒功率控制
模拟乘法器
传感器
Super-high pressure mercury lamp
Constant power control
Analogue multiplier
Sensor
