摘要
为提高真空微电子加速度传感器的线性度,提出了基于数字PID控制算法的真空微电子加速度传感器闭环控制方法。建立了真空微电子加速度传感器闭环控制模型,进行仿真分析。设计制作以TMS320VC5416DSP为核心的控制电路,实现了真空微电子加速度传感器的闭环控制。实验结果表明,在±10m/s2)的测量范围内,加速度计的标度因数为0.212 7,满量程输出电压为0.427 3V,非线性度≤0.98%。该电路能较好的实现真空微电子加速度传感器的闭环控制。
A closed-loop control method of the vacuum microelectronic accelerometer based on the PID control arithmetic was presented to improve its linearity.The mathematic model of the closed-loop accelerometer was established and simulated.The control circuit was realized and tested based on TMS320VC5416.The test results showed thao the scale factor of accelerometer was 0.212 7,full scale output voltage was 0.427 3 V and non-linearity was less or equal to 0.98%.during the test range of ±10 m/s^2）.The circuit can realize good closed-loop control of the accelerometer.
出处
《压电与声光》
CSCD
北大核心
2012年第2期222-225,共4页
Piezoelectrics & Acoustooptics
关键词
加速度传感器
真空微电子
闭环控制
accelerometer
vacuum microelectronic
closed-loop control
