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A Coulomb explosion theoretical model of femtosecond laser ablation materials 被引量:1

A Coulomb explosion theoretical model of femtosecond laser ablation materials
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摘要 In this paper,a kinetic theory of Vlasov equation is proposed to depict electron and ion's nonequilibrium transport processes in a femtosecond time scale.A Coulomb explosion model of femtosecond laser ablation of materials is proposed and numerically simulated.The mechanism of surface Coulomb explosion induced by self-consisted electric field and the impact of laser parameters on the ablation of materials are quantitatively analyzed.The ablation depths calculated by the model are in good agreement with the experimental results.It is shown that,the intensity of self-consisted electric field generated on the dielectric material's surface is much greater than that generated on the metal or the semiconductor material's surface,and Coulomb explosion ablation is more easily to occur on the dielectric material's surface.
出处 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第3期694-701,共8页 中国科学(技术科学英文版)
关键词 femtosecond laser Coulomb explosion surface ablation Vlasov equation 库仑爆炸 烧蚀材料 飞秒激光 爆炸模型 Vlasov方程 动力学理论 半导体材料 电介质材料
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