摘要
微缺陷对化学气相沉积硫化锌(CVDZnS)的光学及力学性能有显著影响。对沉积工艺进行了介绍,通过SEM、TEM及金相对CVDZnS中的微缺陷如异常大晶粒、柱状晶、微裂纹、微孔及杂质的结构形态进行了观测,并对形成原因进行了分析:高的沉积生长速率是生成异常大晶粒的主要原因;反应物浓度高加之衬底表面的屏蔽效应及Zn/H2S<1形成结构疏松的柱状晶组织;沉积温度较低加大沉积生长应力,宏观上产生材料的起拱,微观上造成晶粒的弯曲形变,并在晶体内产生大量微裂纹;沉积室局部反应物浓度高导致微孔及杂质的产生,须改善沉积室气体流形提高反应物浓度的均匀性。
Microcosmic defects influence the optical properties and mechanical properties of CVDZnS effectively.In this article,the deposition technique was introduced and experiment methods such as SEM,TEM and metalloscopy were adopted to study the microcosmic defects such as unique large grain,columnar grain,micro-cracks,micro-poles and impurity.The microstructures of these defects were observed,at the same time the formation cause of these defects was analyzed.The main reason of the growth of unique large grain in CVDZnS was the high deposition rate.High reaction concentration,shield effect on substrate and Zn/H2S1 formed columnar grain which made the structure of CVDZnS loose.The lower deposition temperature increased growth stress in CVDZnS,brought bowing,made the grain blending and produced lots of micro-cracks in crystal.Micro-poles and impurity were made by high reaction concentration in local deposition chamber.So it is necessary to improve the gas flow in deposition chamber to make the concentration uniformly.
出处
《红外与激光工程》
EI
CSCD
北大核心
2012年第1期139-143,共5页
Infrared and Laser Engineering
基金
973计划资助
关键词
CVDZnS
微缺陷
沉积工艺
CVDZnS
microcosmic defect
deposition technique
