摘要
本文提出了一种用于压阻压力传感器中的微机械梁膜结构.这种结构除有灵敏度高、线性好等优点外,还有其他优良性能,而工艺要求又较已有的各种结构为低.有限元素法的应力分析和实验结果证明了这种结构的优良性能.
A novel micromachined Beam-Diaphragm Structure for piezoresistive pressure, sensors has been described. In addition to extremely high sensitivity and good linearity, this structure features many other high performances with larger process tolerance than other structures. Finite-element analysis and preliminary experimental results show that the proposed structure is superior than any other existing structures.
出处
《传感技术学报》
CAS
CSCD
1990年第2期1-7,共7页
Chinese Journal of Sensors and Actuators
关键词
压力传感器
微机械梁-膜结构
pressure sensor micromachined beam-diaphram structure
