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Tb淀积在WO_(2.7~2.9)(兰色氧化钨)表面的XPS研究

THE XPS STUDY OF Tb DEPOSITED ON THE WO_(2·7~2·9)(BLUE TUNGSTEN OXIDE) SURFACE
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摘要 兰色氧化钨(以下简称兰钨)的还原程度是W深加工的关键。而兰钨是有氧空位的,其密度决定于W还原程度。我们在兰钨表面淀积Tb,研究它们的相互作用及化学活性的变化。Tb负电性小于W,易于与兰钨中的氧结合,自身被氧化而使部分兰钨还原,生成WO_2。兰钨表面既有铽的氧化物又有钨的氧化物,致使氧呈不同状态。 The reduotion degree of blue tungsten oxide (it is abbreviated to blue tungsten later) is the key point of the tungsten processing. Beeause of the oxygen vacancies, the density of blue tungsten is determined by the reduction degree of tungsten. We have studied the interaetion and chemical activity of blue tungsten with terbium deposited on the blue tungsten surface. Since the electronegativity of terbium is smaller than that of tungsten, thus terbium is easier to react with oxygen in blue tungsten, resulting in reduction of some blue tungsten to WO_2. Consequently, there exists terbium oxide as well as tungsten oxide in the blue tungsten surface region, where oxygen therefore has different chemical environment.
出处 《真空科学与技术学报》 EI CAS CSCD 1990年第5期307-310,共4页 Chinese Journal of Vacuum Science and Technology
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